[labnetwork] Suggestions for interlocking mask aligners

Wed Oct 28 16:16:33 EDT 2015

Windows laptops can be configured to remain operational with the lid closed.

In Windows 7, click on the battery icon in the task bar and select 'More
Power Options'.

In the window that opens up, on the left, there is an option, 'Choose what
closing the lid does'.

Click on this link and select, 'Do nothing' from the drop-down boxes.

Click 'Apply', then 'Ok'. 

You should be set.

Hiren Trada, Ph.D.

University of Louisville

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Shivakumar Bhaskaran
Sent: Wednesday, October 28, 2015 1:06 PM
To: Vito Logiudice
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Hello Vito,

Sorry I should have mentioned more clearly. For example one of my tool I am
planning to turn off/on the computer screen using the relay. 

But for laptop I cant turn off/on the screen using relay or activate the
screen using relay. May be I am wrong,

I checked with outside vendor regarding this but he mentioned it can be
done, but it involves quite an effort to be done, there is also code to just
turn off/on the laptop screen, but I couldn't find with the relay.

-Thanks

-Shiva

Shivakumar Bhaskaran, Ph.D.

Searle CleanRoom Manager

The University of Chicago

5735 S.Ellis, Room 032

Chicago-60637

Ph:773-795-2297

https://searle-cleanroom.uchicago.edu/

From: Vito Logiudice [mailto:vito.logiudice at uwaterloo.ca] 
Sent: Wednesday, October 28, 2015 11:52 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: Suggestions for interlocking mask aligners

Hello Shiva,

If I'm not mistaken some laptops can be configured to remain active even
when the monitor is folded over to the closed position. In this position the
monitor will turn off but the CPU will remain in operation which I think
would solve your problem. Perhaps you can have someone in your local IT
department have a look at your particular laptops to see if they can be
configured this way.

Best regards,

Vito

From: Shivakumar Bhaskaran <sbhas at uchicago.edu>
Date: Wednesday, October 28, 2015 at 12:30 PM
To: Leif Johansen <lej at danchip.dtu.dk>, Vito Logiudice
<vito.logiudice at uwaterloo.ca>, "labnetwork at mtl.mit.edu"
<labnetwork at mtl.mit.edu>
Subject: RE: Suggestions for interlocking mask aligners

Hello All,

Since you all are exchanging emails regarding the interlock, I myself
planning to do in my facility. I was able to figure out for some of the tool
that I have. But two of my tool is hooked up to laptop, if I shutdown the
laptop or close the lid of the laptop the software stops working and then
the vacuum valve or heater shuts off which I don't want to have like this. I
don't want to add computer screen or load the software in desktop due to
space constraint. 

The two tools that I am having are one is Arradiance Gemstar ALD and another
is PE 100 O2 plasma etch. I don't want to pump to be turned off/on using
relay, because I want the system to in vacuum even if its not in use.

-Thanks

-Shiva

Shivakumar Bhaskaran, Ph.D.

Searle CleanRoom Manager

The University of Chicago

5735 S.Ellis, Room 032

Chicago-60637

Ph:773-795-2297

https://searle-cleanroom.uchicago.edu/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Leif Johansen
Sent: Wednesday, October 28, 2015 9:47 AM
To: 'Vito Logiudice' <vito.logiudice at uwaterloo.ca>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Hello Vito, 

At DTU Danchip we have two MA-6 aligners. On both tools we have interlocked
the electrical signal for the solenoid controlling the CDA for the shutter.
It works fine. If you want, we can mail you some pictures of how we did it. 

Of course, if a user really wanted to cheat, he or she could perform all
work before the exposure (i.e. mask load, wafer load and alignment) without
logging in, and then only log in during exposure. In reality, we do not see
such misuse. 

Best regards, 

Leif

From:labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Vito Logiudice
Sent: 26. oktober 2015 21:43
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suggestions for interlocking mask aligners

Dear Colleagues,

I would appreciate hearing how you may have interlocked the mask aligners in
your respective facilities. In our particular case we have a Suss-Microtec
MA6 aligner and we are struggling to identify a parameter that can be
interlocked without causing the system additional wear and tear. Any
insights would be appreciated. Thank you.

Best regards,

Vito

--

Vito Logiudice  P.Eng.

Director of Operations, Quantum NanoFab

University of Waterloo

Lazaridis QNC 1207

200 University Avenue West

Waterloo, ON           Canada N2L 3G1

Tel.: (519) 888-4567  ext. 38703

Email: vito.logiudice at uwaterloo.ca

Website: https://fab.qnc.uwaterloo.ca

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