[labnetwork] Suggestions for interlocking mask aligners

Thu Oct 29 12:46:07 EDT 2015

Speaking of software solutions, we developed a simple screen lock for 
our lab to integrate with the coral lab management software, though it 
could be adopted to other systems without much effort.  It runs a coral 
client in the foreground and only allows access to that client -- no 
other software, until the instrument is enabled in coral.  The 
screenlock can be controlled remotely with a web interface.  There is 
also a local override by password for administrators.  Attached are 
screenshots of the screenlock and the web interface.

Thanks,
Ryan

On 10/28/15 2:39 PM, Hiren Trada wrote:
>
> One possible solution is to use remote login programs.
>
> Remote login programs like Logmein and TeamViewer allow users to log 
> into remote computers and lock out the keyboard, mouse and monitor.
>
> If the equipment laptop is connected to the internet, you can connect 
> to the laptop (or any computer for that matter) from any other computer.
>
> TeamViewer will allow you to remotely lock the computer as well as any 
> local input devices on the computer, including the keyboard, trackpad 
> & mouse.
>
> TeamViewer is free for use and has apps for Windows, Mac, Android and iOS.
>
> So it can used on any computer, laptop, phone or tablet.
>
> Also, it can connect to multiple computers from one computer, so it is 
> possible to control and lock more than one piece of equipment.
>
> I’m not sure if there is a connection limitation with the free usage.
>
> Hiren Trada, Ph.D.
>
> University of Louisville
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Shivakumar 
> Bhaskaran
> *Sent:* Wednesday, October 28, 2015 1:06 PM
> *To:* Vito Logiudice
> *Cc:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] Suggestions for interlocking mask aligners
>
> Hello Vito,
>
> Sorry I should have mentioned more clearly. For example one of my tool 
> I am planning to turn off/on the computer screen using the relay.
>
> But for laptop I cant turn off/on the screen using relay or activate 
> the screen using relay. May be I am wrong,
>
> I checked with outside vendor regarding this but he mentioned it can 
> be done, but it involves quite an effort to be done, there is also 
> code to just turn off/on the laptop screen, but I couldn’t find with 
> the relay.
>
> -Thanks
>
> -Shiva
>
> Shivakumar Bhaskaran, Ph.D.
>
> Searle CleanRoom Manager
>
> The University of Chicago
>
> 5735 S.Ellis, Room 032
>
> Chicago-60637
>
> Ph:773-795-2297
>
> https://searle-cleanroom.uchicago.edu/
>
> *From:*Vito Logiudice [mailto:vito.logiudice at uwaterloo.ca]
> *Sent:* Wednesday, October 28, 2015 11:52 AM
> *To:* Shivakumar Bhaskaran <sbhas at uchicago.edu 
> <mailto:sbhas at uchicago.edu>>
> *Cc:* labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> *Subject:* Re: Suggestions for interlocking mask aligners
>
> Hello Shiva,
>
> If I’m not mistaken some laptops can be configured to remain active 
> even when the monitor is folded over to the closed position. In this 
> position the monitor will turn off but the CPU will remain in 
> operation which I think would solve your problem. Perhaps you can have 
> someone in your local IT department have a look at your particular 
> laptops to see if they can be configured this way.
>
> Best regards,
>
> Vito
>
> *From: *Shivakumar Bhaskaran <sbhas at uchicago.edu 
> <mailto:sbhas at uchicago.edu>>
> *Date: *Wednesday, October 28, 2015 at 12:30 PM
> *To: *Leif Johansen <lej at danchip.dtu.dk <mailto:lej at danchip.dtu.dk>>, 
> Vito Logiudice <vito.logiudice at uwaterloo.ca 
> <mailto:vito.logiudice at uwaterloo.ca>>, "labnetwork at mtl.mit.edu 
> <mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu 
> <mailto:labnetwork at mtl.mit.edu>>
> *Subject: *RE: Suggestions for interlocking mask aligners
>
> Hello All,
>
> Since you all are exchanging emails regarding the interlock, I myself 
> planning to do in my facility. I was able to figure out for some of 
> the tool that I have. But two of my tool is hooked up to laptop, if I 
> shutdown the laptop or close the lid of the laptop the software stops 
> working and then the vacuum valve or heater shuts off which I don’t 
> want to have like this. I don’t want to add computer screen or load 
> the software in desktop due to space constraint.
>
> The two tools that I am having are one is Arradiance Gemstar ALD and 
> another is PE 100 O2 plasma etch. I don’t want to pump to be turned 
> off/on using relay, because I want the system to in vacuum even if its 
> not in use.
>
> -Thanks
>
> -Shiva
>
> Shivakumar Bhaskaran, Ph.D.
>
> Searle CleanRoom Manager
>
> The University of Chicago
>
> 5735 S.Ellis, Room 032
>
> Chicago-60637
>
> Ph:773-795-2297
>
> https://searle-cleanroom.uchicago.edu/
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> <mailto:labnetwork-bounces at mtl.mit.edu> 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Leif Johansen
> *Sent:* Wednesday, October 28, 2015 9:47 AM
> *To:* 'Vito Logiudice' <vito.logiudice at uwaterloo.ca 
> <mailto:vito.logiudice at uwaterloo.ca>>; labnetwork at mtl.mit.edu 
> <mailto:labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Suggestions for interlocking mask aligners
>
> Hello Vito,
>
> At DTU Danchip we have two MA-6 aligners. On both tools we have 
> interlocked the electrical signal for the solenoid controlling the CDA 
> for the shutter. It works fine. If you want, we can mail you some 
> pictures of how we did it.
>
> Of course, if a user really wanted to cheat, he or she could perform 
> all work before the exposure (i.e. mask load, wafer load and 
> alignment) without logging in, and then only log in during exposure. 
> In reality, we do not see such misuse.
>
> Best regards,
>
> Leif
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> <mailto:labnetwork-bounces at mtl.mit.edu> 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Vito Logiudice
> *Sent:* 26. oktober 2015 21:43
> *To:* labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Suggestions for interlocking mask aligners
>
> Dear Colleagues,
>
> I would appreciate hearing how you may have interlocked the mask 
> aligners in your respective facilities. In our particular case we have 
> a Suss-Microtec MA6 aligner and we are struggling to identify a 
> parameter that can be interlocked without causing the system 
> additional wear and tear. Any insights would be appreciated. Thank you.
>
> Best regards,
>
> Vito
>
> --
>
> Vito Logiudice  P.Eng.
>
> Director of Operations, Quantum NanoFab
>
> University of Waterloo
>
> Lazaridis QNC 1207
>
> 200 University Avenue West
>
> Waterloo, ON           Canada N2L 3G1
>
> Tel.: (519) 888-4567  ext. 38703
>
> Email: vito.logiudice at uwaterloo.ca <mailto:vito.logiudice at uwaterloo.ca>
>
> Website: https://fab.qnc.uwaterloo.ca
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-- 
---------
Ryan Taylor
Software Systems Development Engineer
University of Utah Nanofab
www.nanofab.utah.edu
Phone: (801) 587-0671
Email: ryant at nanofab.utah.edu

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