[labnetwork] Deep silicon etcher

[Morrison, Richard H., Jr.]

In 2015 we installed a SPST Rapier tool in the Draper uFab and it is a work horse, excellent field service response. We run 100mm and 150mm wafer, mostly DRIE of Silicon and RIE etch of thick 2-3um SiO2.

Rick


Draper
Principal  Member of the Technical Staff
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of CHUNG Wing Leong
Sent: Monday, December 05, 2016 10:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Deep silicon etcher

NFF of HKUST is looking for a silicon etcher to enhance our silicon etch capability. Is there any suggestion on tool selection? and users'
feedback/recommendation?

Currently, we are using STS machine which is 15 years old.

Thank You
Jeff


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
________________________________
 Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________