[labnetwork] ALD of Copper, Silver, Gold or Aluminum

[Robert Vandusen]

Hi John.
I know that our group here at Carleton University that Bill mentioned has some ALD experience with those materials.
I will forward your info along.

Rob.
Robert Vandusen
Microfabrication and FANSSI Cleanlab Facility Manager
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600 ext 5761
rvanduse at doe.carleton.ca<mailto:rvanduse at doe.carleton.ca>




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Flounders
Sent: Monday, December 12, 2016 8:53 PM
To: John Lovaasen <Jlovaasen at tritonsys.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] ALD of Copper, Silver, Gold or Aluminum

John,
I'd start 20 miles down the road with Ultratech
http://www.cambridgenanotechald.com/services/index.shtml

If they have already said no, Picosun claims gold, silver and copper
using gold and copper precursors from Prof. Sean Barry and Jason Coyle,
Carleton University, Canada; and silver precursors from Timo Hatanpää,
University of Helsinki, Finland.

Bill Flounders
UC Berkeley


John Lovaasen wrote:
I'm looking for someone that has recent work on depositing Copper, Silver, Gold or Aluminum on dielectric substrates via ALD. I'm looking for less than 10nm coating thickness.

Thanks,


John Lovaasen
Staff Engineer

Triton Systems, Inc.
200 Turnpike Road
Chelmsford, MA 01824
Ph# 978-856-4152
Cell# 701-899-0323
jlovaasen at tritonsystems.com<mailto:jlovaasen at tritonsystems.com>




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