[labnetwork] Micro fabrication modeling software tools

[Shivakumar Bhaskaran]

Try nanohub.org. It has lots of resources for simulation and literature/slides for process that you are looking for.
I have used Silvaco-Athena software during my courses, that was a while ago, not sure what is the current trend.

-Shiva

Shivakumar Bhaskaran, Ph.D.,
Research and Development Scientist and Engineer,
National Nanotechnology Coordinated Infrastructure (NNCI),
Stanford University, 348 Via Pueblo, Spilker Building,Room 004, Stanford, CA 94305.
Ph:650-498-5653
http://nanolabs.stanford.edu<http://nanolabs.stanford.edu/>


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jugessur, Aju S
Sent: Monday, December 19, 2016 10:28 AM
To: LabNet (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Micro fabrication modeling software tools

Hi,

I am looking to invest on various computational modeling tools for Microfabrication processes, in particular,

(a) Dry-etching
(b) Thin film deposition (ALD/Sputter/Ebeam evaporation)
(c) Ebeam and Optical Lithography

These softwares will be mainly used for teaching purposes but will also be used for research.

Would anyone recommend the software tools that they have been using for the above  processes? We do have Monte Carlo and Beamer.

Thanks
Regards
Aju


Aju Jugessur Ph.D.
Director, University of Iowa Microfabrication Facility
Professor (Adj.), Physics and Astronomy
OSTC, Iowa Advanced Technology Labs
University of Iowa

205 N. Madison St
Iowa City, IA 52242
319 -353-2342
aju-jugessur at uiowa.edu<mailto:aju-jugessur at uiowa.edu>
http://ostc.uiowa.edu/uimf
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20161219/9512731b/attachment.html>