[labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

[Noah Clay]

Hey Vito,

We interlock the pneumatics on our YES oven and barrel ashers with a simple 24V valve from McMaster-Carr; the valve cost is about $30.

Best,
Noah

Sent from my iPhone

> On Feb 8, 2016, at 16:53, Vito Logiudice <vito.logiudice at uwaterloo.ca> wrote:
> 
> Dear Colleagues,
> 
> I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include the following:
> 
> Oxygen plasma strip system: http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf
> HMDS prime oven: http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf
> 
> Thank you very much for any insights.
> 
> Best regards,
> Vito
> --
> Vito Logiudice  P.Eng.
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca
> Website: https://fab.qnc.uwaterloo.ca
> 
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