[labnetwork] Lithium Compound target in the Sputtering

[Luciani, Vincent]

Hello Shiva,

We successfully sputter deposit these materials.  Dr. Gerard Henein<http://www.nist.gov/cnst/henein.cfm> (copied) is the scientist responsible for our sputter tools and processes and is a wealth of information.  I would suggest giving him a call if you want some first-hand experience and expertise.
Gerard's number is 301-975-5645.

Best Regards,

Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886






From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: Monday, February 15, 2016 10:50 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Lithium Compound target in the Sputtering


Due to interest of fabricating battery device, we have users requesting for sputtering LiCoO2 and Li3PO4.

Have anyone used this materials in your sputtering system. Will this material have contamination issue with other processes (mostly metals). Do I need to follow any safety procedures before/after sputtering.

Thanks
-Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

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