[labnetwork] EVG 620 Mask Aligner issue

[Rob Vandusen]

Not sure if you are running your system in constant power or constant intensity mode,  but if it is in constant intensity it may be limiting the power.

 

Rob.

Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600 ext 5761
rvanduse at doe.carleton.ca 



 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: January-14-16 10:21 AM
To: Mario Portillo <hbtusainc at yahoo.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] EVG 620 Mask Aligner issue

 

The controller has interlock, the lamp will turn ON only if the cooling and air is ON, may be I can bypass the interlock will check with EVG regarding this.

Thanks

-Shiva

 

 

Shivakumar Bhaskaran, Ph.D.

Searle CleanRoom Manager

The University of Chicago

5735 S.Ellis, Room 032

Chicago-60637

Ph:773-795-2297

https://searle-cleanroom.uchicago.edu/

 

From: Mario Portillo [mailto:hbtusainc at yahoo.com] 
Sent: Thursday, January 14, 2016 6:10 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu <mailto:sbhas at uchicago.edu> >; labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> 
Subject: Re: [labnetwork] EVG 620 Mask Aligner issue

 

Shiva, a few suggestions ; make sure lamp is installed correctly, anode side down, anode/ cathode connections nice n tight at the light source n power supply, over cooling ??? Turn cooling off n turn lamp on, for a 500W lamp the normal operating voltage should be around average of 60vdc and 8.5 amps, last but not least .. A bad batch of lamps ??? I have seen this a few times thru the years...

 

I hope this helps..... Regards 


Sent from Yahoo Mail for iPhone <https://yho.com/footer0> 

On Wednesday, January 13, 2016, 4:52 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu <mailto:sbhas at uchicago.edu> > wrote:

The lamp in the mask aligner is not reaching 500W its stays at 150W. I did send the power supply to EVG to test it in their unit and it works fine. I changed the bulbs and still the same issue. Does anyone had faced similar issue in your Mask Aligner.

 

-Thanks

-Shiva

 

Shivakumar Bhaskaran, Ph.D.

Searle CleanRoom Manager

The University of Chicago

5735 S.Ellis, Room 032

Chicago-60637

Ph:773-795-2297 <tel:773-795-2297> 

https://searle-cleanroom.uchicago.edu/

 

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