[labnetwork] Ambios XP2 profilometer repair

Mary Tang mtang at stanford.edu
Wed Jul 20 16:28:33 EDT 2016


Hi Phil --

Have you checked with Brumley South?  I believe this is run by some 
former KLA Tencor service engineers.  We've had great service on legacy 
tools with them -- and they are generous with advice on repairs and used 
purchases.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Bldg 141, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu


On 7/20/2016 11:11 AM, Himmer, Phil wrote:
>
> Hello
>
> Does anyone know of a company/person that can work on an old Ambios 
> profilometer. We have an XP2 profilometer that needs repair and KLA 
> Tencor who bought Ambios is unable to repair our system. This tool was 
> discontinued before they acquired Ambios so they have minimal 
> documentation and few parts for these tools.
>
> Thanks
>
> Phil
>
> Dr. Phillip Himmer
>
> Facility Manager:  Montana Microfabrication Facility
>
> Montana State University
>
> Bozeman Mt, 59717
>
> Ph: 406-994-7178
>
> Email: philh at ece.montana.edu <mailto:philh at ece.montana.edu>
>
>
>
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