[labnetwork] PDMS in sputtering tool

[Daniel Christensen]

Julia,

Univ of WI-Madison org structure:
Staff Director (1): directs all College of Eng. Core facilities of which we are 1 of 3 (full time FTE, not a faculty member)
Lab Manager (1): technical manager and business manager and equipment repair engineer and some admin
Staff Engineers (3.5): tool training, tool repair, some admin, and some I.T.


Daniel C. Christensen
WCAM, University of Wisconsin-Madison
1550 Engineering Dr
Madison, WI 53706




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu
Sent: Friday, June 17, 2016 5:22 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PDMS in sputtering tool

Greetings everyone!  I had a great time at UGIM and enjoyed seeing old friends and making new acquaintances.  The University of Utah hospitality was fantastic.  I do have some questions.

1.  We have had an aluminum adhesion issue with bubbling under the deposited film.  We have had a user put their PDMS devices into our sputtering tool and have been told that outgasing PDMS could be the source of our bubbling underneath aluminum.  We do not see this behavior with other metal depositions.  Do you ban PDMS from your processing chambers?  Also, we will go ahead with decontamination using sand blasting and solvent wipe downs, but do you recommend other processes (i.e. chemical dips for parts that can be removed)?

2.  My second question revolves around organizational structure.  We currently have a Faculty Director, Cleanroom Manager (me), 3 Engineers and 1 Admin.  Structures and the number of people in facilties vary immensely due to size of the facility, but I wanted to know how many split their cleanroom manager position into a technical manager and business operations manager.  The business operations manager would primarily handle administrative tasks and rarely step foot into the cleanroom.


Cheers!



Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292



(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>
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