[labnetwork] LiF evaporation

[Goodman, James R]

I would be more worried about subsequent chamber cleans.

Jay.

James Goodman
Equipment Manager, Saab/ETIC Nanofabrication Laboratory
University of Massachusetts, Lowell
40 University Ave.
Room 121
Lowell, MA -01854
Office (978) 934-3469
Cell (603) 235-1496



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Thursday, March 24, 2016 1:08 PM
To: Lab Network (labnetwork at mtl.mit.edu)
Subject: [labnetwork] LiF evaporation

Dear Colleagues and Friends, 

Would anyone be willing to share their pre and post evaporation protocols/SOPs for evaporating hazardous compounds? A user needs LiF that has an exposure limit of 3.5mg/m^3. I am not too worried about chamber walls as they are only depositing <10nm and capping with another film. How about contamination around the hearth and crucible? Load and unload with respirators? Etc

Gratefully, 

Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Coordinated Infrastructure (NNCI) University of Washington Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/


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