[labnetwork] Sputtering of YBCO

[Gupta, Su]

Hi Nathan:

No health risks at all with YBCO. You may notice some resputtering of the material, which is why some folks sputter it off-axis. You should sputter it reactively with oxygen. As long as you presputter your metal targets before deposition of those metals you should be fine -- YBCO will not contaminate your system.

Best,
Su Gupta
UA Micro-Fabrication Facility
________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Nathan Nelson - Fitzpatrick [nnelsonfitzpatrick at uwaterloo.ca]
Sent: Wednesday, May 11, 2016 3:52 PM
To: 'Labnetwork'
Subject: [labnetwork] Sputtering of YBCO

Hi All,

I just recently had a user request to sputter YBCO in one of our sputter systems.  This sputter system is mainly used for the deposition of pure metal films (Al, Ti, Nb) and occasionally some reactive sputtering with metal targets.  The system typically sits with a base pressure in the low 10-7 Torr range.  I don’t have any experience with YBCO I’m wondering if anyone can share some knowledge about any possible health or contamination risks associated with this material.  Also, any thoughts about how to group or segregate this process to run it safely would be great!

Thank you,
  -Nathan
--
Nathan Nelson-Fitzpatrick  PhD
Nanofabrication Process Engineer
Quantum NanoFab
University of Waterloo
200 University Avenue West
Waterloo, ON   Canada  N2L 3G1
Ph: +1 519-888-4567 ext. 31796




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