[labnetwork] ZEP-520A7 e-beam resist

Tue May 31 23:04:49 EDT 2016

Hi Edmond,

To add to Michael’s comment, we have used a similar approach with 10nm of
sputtered Al on PMMA.  After exposure, we remove the Al with standard
potassium hydroxide or TMAH based developers, such as AZ400k or MF-CD26.
The PMMA can then be developed in MIBK/IPA without issue.  

Best Regards,

Matt

-- 
Matthew T. Moneck, Ph.D.
Executive Manager, Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
www.ece.cmu.edu <http://www.ece.cmu.edu> 
nanofab.ece.cmu.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Michael Rooks
Sent: Tuesday, May 31, 2016 4:12 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] ZEP-520A7 e-beam resist

For pmma and zep we simply sputter 20nm Au on top, then later remove it with
KI/I gold etch (from Transene).

For HSQ on insulators we use our own mixture of PSS, a water soluble
polymer, with gold on top. You can find the details here
<http://nano.yale.edu/sites/default/files/files/pssa.pdf> . It's very cheap.

--------------------------------
Michael Rooks 
Yale Institute of Nanoscience and Quantum Engineering 
nano.yale.edu <http://nano.yale.edu>  

On 05/31/2016 12:38 PM, Edmond Chow wrote:

Hi, 

I have a related question about ebeam resist. I have been using AquaSAVE as
anticharging layer for ebeam lithography.

However, I can't seem to find the distributor which will sell AquaSAVE in US

Do you have any information about how to get AquaSAVE from US or any
replacement for AquaSAVE?

Thanks in advance.

Edmond

On Tue, May 31, 2016 at 9:01 AM, Peter J Duda III <duda at uchicago.edu
<mailto:duda at uchicago.edu> > wrote:

Linda, Leif et al

FYI 

GL-2000 has been discontinued recently and is no longer available through
Gluon Lab.  They claim to be working on other high-performance resists, but
give no specifics at this time.  

Thanks

Peter J Duda

Technical Manager, Pritzker Nanofabrication Facility

Institute for Molecular Engineering

University of Chicago

5640 South Ellis Avenue

ERC LL178

Chicago, IL  60637

Office: 773-702-8903 <tel:773-702-8903> 
Pager/Text:  773-652-0480 <tel:773-652-0480> 

duda at uchicago.edu <mailto:duda at uchicago.edu> 

ime.uchicago.edu
<https://urldefense.proofpoint.com/v2/url?u=http-3A__ime.uchicago.edu&d=AwMF
aQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=
xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=txauFZDRNt39sv6hSAlCenH1wfF7k-
cTqV80LnAh-lg&e=> 

From: labnetwork-bounces at mtl.mit.edu <mailto:labnetwork-bounces at mtl.mit.edu>
[mailto:labnetwork-bounces at mtl.mit.edu
<mailto:labnetwork-bounces at mtl.mit.edu> ] On Behalf Of Leif Johansen
Sent: Monday, May 30, 2016 3:52 AM
To: 'Linda Macks' <linda.macks at unsw.edu.au <mailto:linda.macks at unsw.edu.au>
>; labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> 
Subject: Re: [labnetwork] ZEP-520A7 e-beam resist

Hello Linda, 

Last time we purchased ZEP-520 was back in May 2014. We got it from Marubeni
<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.marubeni.com_&d=AwM
FaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m
=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=EtvHsu62p-Fb3Flqssz76lbw0w8FO
d4Nphxsppe_X1c&e=> The MTL Mail Server has detected a possible fraud attempt
from "urldefense.proofpoint.com" claiming to be http://www.marubeni.com/

We have actually stopped using ZEP-520 due to the very high price. Instead,
we have switched to AR-P C-6200 from Allresist GmbH
<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.allresist.com_csar-
2D62-2Dar-2Dp-2D6200_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrI
vVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=V3
R48he1i7j8wgR2Ongk8aobIDJeprgB8ZUFRRlBblE&e=> The MTL Mail Server has
detected a possible fraud attempt from "urldefense.proofpoint.com" claiming
to be http://www.allresist.com/csar-62-ar-p-6200/. If you are interested, we
can provide you with more process details about this resist. 

Another alternative would be the gL-2000 from Gluon Lab, which we purchased
through Fine Material System Inc in Japan. We have tested this resist once,
but we are not using it routinely in the lab. 

Best regards, 

Leif

Leif S. Johansen 

Head of Operations

DTU Danchip 

Technical University of Denmark

Danchip 

Ørsteds Plads, Byg. 347 

2800  Lyngby 

Direct +45 45255713 <tel:%2B45%2045255713>  

Mobile +45 25348992 <tel:%2B45%2025348992> 

lesjo at danchip.dtu.dk <mailto:lesjo at danchip.dtu.dk>  

<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.danchip.dtu.dk_&d=A
wMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc
&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=bad6otKPG_IPaLUNRy_wPwTwiOh
eGoHbLQS8KTbnNz4&e=> The MTL Mail Server has detected a possible fraud
attempt from "urldefense.proofpoint.com" claiming to be www.danchip.dtu.dk/ 

From: labnetwork-bounces at mtl.mit.edu <mailto:labnetwork-bounces at mtl.mit.edu>
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Linda Macks
Sent: 28. maj 2016 02:15
To: labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> 
Subject: [labnetwork] ZEP-520A7 e-beam resist

Hello labnetworkers,

We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows of
a supplier who can deliver to Australia, I would appreciate contact details.

Many thanks,

Linda

Dr Linda Macks

Facility Manager, ANFF-NSW

Australian National Fabrication Facility

School of Electrical Engineering & Telecommunications

University of New South Wales

UNSW Sydney NSW 2052

Australia

Phone: +61 (2) 9385 7845 <tel:%2B61%20%282%29%209385%207845> 

Fax: +61(2) 9385 5114 <tel:%2B61%282%29%209385%205114> 

Email: linda.macks at unsw.edu.au <mailto:linda.macks at unsw.edu.au> 

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-- 

Edmond Chow

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