[labnetwork] CO2 purity for CPD?

DeRose, Guy A. derose at caltech.edu
Fri Oct 28 14:47:53 EDT 2016


Mariusz,

In my lab, we use “Coleman Instrument grade” 99.99% CO2 in an aluminum cylinder with a dip tube.  We have found that the aluminum cylinders are much easier to handle than the steel ones due to reduced weight, and much cleaner to have inside the lab.


Guy DeRose, PhD, Member of the Professional Staff
Associate Director, Kavli Nanoscience Institute
California Institute of Technology, Pasadena, CA USA
(O) 1-626-395-3423 (M) 1-626-676-8529
http://kni.caltech.edu Skype: guy_derose


From: <labnetwork-bounces at mtl.mit.edu> on behalf of Mariusz Martyniuk <mariusz.martyniuk at uwa.edu.au>
Date: Friday, October 28, 2016 at 1:18 AM
To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: [labnetwork] CO2 purity for CPD?

Dear LabNetwork,

I would like to investigate what purity of CO2 is being used for Critical Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply with a comment if you are using CPD? Did anyone investigate if there are significant benefits of using  5N over 3N purity of CO2?

Cheers,
Marius

Mariusz Martyniuk
-----------------------------
Associate Professor, ANFF-WA Managing Director
Microelectronics Research Group
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
The University of Western Australia
35 Stirling Highway, Crawley WA 6009, Australia<%20%20>
Tel: +61 8 6488 1905<tel:+61%208%206488%201905>, Fax: +61 8 6488 1095<tel:+61%208%206488%201095>
Secretary Tel: +61 8 6488 3801<tel:+61%208%206488%203801>, Rm 1.73, http://www.mrg.uwa.edu.au/
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