[labnetwork] EBeam Lithography on Glass substrates

[Price, Aimee]

Aju,
Does the problem look like charging (pattern misplacement, some distorted patterns that look a bit broken up, etc.) or does it look like a focus problem?  Depending on what kind of EBL tool you have not only do you have to be concerned about charging, but also making sure that the tool can find the right focus.  Many tool platforms use a laser height meter to determine the height of the sample locally and then locally adjust the final focus.

You can email me directly if you wish.  At Ohio State, we pattern on quartz, ceramics, SiC, sapphire, etc. more often than not so we have several options for processing fixes.

You'll likely need to get some images from him for anyone who offers to help.

My email is price.798 at osu.edu<mailto:price.798 at osu.edu>.

Regards,
Aimee Price



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jugessur, Aju S
Sent: Monday, August 21, 2017 12:27 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] EBeam Lithography on Glass substrates

Hi,

I have a user who is having inconsistent results when exposing patterns (100-200 nm in size) on glass substrate.
He is using a 5 nm Al layer between the 100nm ZEP and glass substrate. He obtained good results but it does not seem reproducible all the times.
He is also ensuring that there is good contact between the sample clips and the metal layer. Another approach would be to place the metal on top of the resist.

He has also used the conducting polymer PDOT on ZEP but it does not seem to adhere too well. He could also be doing a step or steps consistently wrong and be unaware.

This is quite a common and established process but I would like to see if the members have any suggestions to ensure reproducible and consistent results for ebeam lithography on glass substrates.
I will provide more information/details once I receive some feedback.

Thanks,
Regards
Aju




Aju Jugessur, Ph.D.
Director, University of Iowa Microfabrication Facility (UIMF)
Optical Science and Technology Center
Professor Adjunct, Physics and Astronomy
University of Iowa
Office: IATL 202, Tel: 319-3532342
Labs: IATL 170, 172, 174
https://ostc.uiowa.edu/uimf





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