[labnetwork] Sputtering targets storage

Aebersold,Julia W. julia.aebersold at louisville.edu
Thu Dec 14 15:52:48 EST 2017


We currently do not store our targets in foil.  Only in the container they arrived in and in a storage cabinet in the cleanroom.

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Guo, Jing
Sent: Thursday, December 14, 2017 12:50 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sputtering targets storage

Hi All,

We have a lot sputtering targets for our UHV sputtering system. Right now each target is covered by Aluminum foil stored in a plastic box.
We are wondering whether the Aluminum foil is necessary for all the targets. After several times the foil will become wrinkled and it is kind annoying to cover a target with wrinkled foil.
Do you have any good idea to store those targets? Please advise.
And for those used ones, any good way to dispose them or recycle them?

Thanks.

Best Regards,

Jing

Research Lab Supervisor
Nanofabrication Facility
University of Houston
Postal Address:
UNIVERSITY OF HOUSTON
NANOFABRICATION FACILITY
3517 CULLEN BLVD, RM 1011
HOUSTON TX  77204-5062
Phone:  832-842-8822
Email:  jguo5 at central.uh.edu<mailto:jguo5 at central.uh.edu>
Web:  www.uh.edu/nanofab<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.uh.edu_nanofab&d=DwMFAg&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=4NgL_y0H4v6_xwc96R2nPAerxTOXjGB--1ReWbK_hdY&s=e_lcEzPVBySbsZgFIZJHXTn6KkBFgUQuAQpXH3P3nQg&e=>
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