[labnetwork] Two SEM/EBLs set up in the same room : comments

[Palard, Marylene]

Dear Lab Managers 
E-beam photolithography/ SEM experts,

At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.

The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.

Assuming that
- both items are fitting in the room,
- the manufacturer site survey passed,
- we agreed with jagged edges pictures due to cleanroom flow
Could you please share your thoughts on that plan.

Sincerely
Marylene, an avid reader of the labnetwork messages

_______________________________
Marylene Palard, Ph.D.
Program Manager
http://www.mrc.utexas.edu/
(512) 965 6671

The University of Texas | Microelectronics Research Center
Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445