[labnetwork] Two SEM/EBLs set up in the same room : comments

[Price, Aimee]

Hi all,
We have two columns (one Vistec/Raith EBPG5000 EBL and one Zeiss Ultra Plus SEM) 16 feet apart.  They both do have Spicer systems and also vibration cancellation, but we have no ill effects from either.  Both vendors did site surveys and suggested the proper noise cancellation.  

Yes the cleanroom acoustics and sometimes vibration can reduce the ultimate resolution of your microscope, but most vendors have approaches to minimize it (noise cancellation of some sort).  

Best of luck to you and congratulations on your new systems!

Aimee

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark K Mondol
Sent: Tuesday, December 19, 2017 4:42 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Two SEM/EBLs set up in the same room : comments

I think that you would want to have some sort of Spicer or ADE field cancellation system on both systems. Large changes in lens current might couple to the SEM.

However I defer to Mike Rooks opinion on this as he actually operated a lab with both.

I have an Elionix tool about 10 meters from a Raith (Zeiss Gemini
column) and they seem to do alright, with the Spicer cancellation system. There is also a Zeiss Orion He Ion about another 10 meters away and a JEOL 2010 TEM nearby too.

Regards,

Mark K Mondol


On 12/19/2017 3:04 PM, Palard, Marylene wrote:
> Dear Lab Managers
> E-beam photolithography/ SEM experts,
>
> At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.
>
> The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.
>
> Assuming that
> - both items are fitting in the room,
> - the manufacturer site survey passed,
> - we agreed with jagged edges pictures due to cleanroom flow Could you 
> please share your thoughts on that plan.
>
> Sincerely
> Marylene, an avid reader of the labnetwork messages

--
Mark K Mondol
Assistant Director NanoStructures Laboratory And Facility Manager Scanning Electron Beam Lithography Facility Bldg 36  Room 229 www.rle.mit.edu/sebl mondol at mit.edu office - 617-253-9617 cell - 617-224-8756


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