[labnetwork] LED lights in photosensitive areas - yellow lens needed?

[Nava Ariel-Sternberg]

Hi Frank, 

 

We have installed LED lights in our litho area and heard the same claim but we checked with photoresist manufacturers and their recommendation was to have amber filers and block all wavelength below 500nm. 

 

Although LED lights do not emit in the UV, some of the photoresists are sensitive to the lower part of the visible range. 

 

We ended up purchasing amber plastic filters and installed them on top of the LED lights. 

 

Hope this helps,

 

Nava

 

 

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Facilities

Columbia University

530 w120th st., NY 10027

Room 1015/MC 8903

Office: 212-854-9927

Cell: 201-562-7600

 

​

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Frank Gavin
Sent: Friday, July 7, 2017 12:58 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] LED lights in photosensitive areas - yellow lens needed?

 

Hello everyone

 

We are suppliers of wet process equipment and one of our vendors of HEPA and ULPA fan/filter units tells us that we do not need to add yellow lens covers over LED light because such lights do not emit ultraviolet light.  I am always suspicious of simple convenient solutions so I want to put this statement out to this learned community and learn if this statement is true.  Perhaps some members have experience using LED lights in photosensitive areas of their fab and would care to comment?

 

 

Best Regards,

FRANK GAVIN, Sales Eng.

 <http://www.wafabintl.com/> 

6161 Industrial Way, Livermore CA 94551
(925) 455-5252 ext 2420  Fax: (925) 455-5351
http://www.wafabintl.com <http://www.wafabintl.com/> 

direct dial: 925-800-5551

cell (408) 314-6199

 

Please visit us at:

 <http://www.semi.org/en/semicon-west-2017> 

 

July 11th –13th 

Moscone Center, San Francisco    Booth: 7817 (West Hall)

 

 

 

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