[labnetwork] AMAT CD-SEM support

[Stieg, Adam]

Dear All,

We are having difficulty diagnosing a few issues with our Applied Materials Optal 7830i CD-SEM, even with the assistance of AMAT service engineers. Does anyone have this or a similar tool and have information for other 3rd party vendors we might contact for support?

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu



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