[labnetwork] PVD of CaF2

[Kurt Kupcho]

I have a student that wants to do physical vapor deposition of CaF2.  The material itself is safe but when heated can cause HF vapors (according to SDS).  Under the vacuum of a PVD system I assume this is not a concern? Or is it?

Are there any other safety concerns with PVD of this material?  In your experience does sputter or thermal evaporation of CaF2 work better?

In addition to any safety concerns with the PVD of this material what about safety of venting the chamber afterwards and any cleanliness/particulate issues in the chamber afterwards this source may have caused?

If you have experience with this material your input would be very much appreciated!

Thank you - Kurt


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Kurt Kupcho
Process Engineer

WCAM
1550 Engineering Drive
ECB Room 3110
Madison, WI  53706

E:  kurt.kupcho at wisc.edu<mailto:kurt.kupcho at wisc.edu>
T:  608-262-2982

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