[labnetwork] Sputtering of MgF2

[julia.aebersold at louisville.edu]

I have a client that wants to sputter MgF2 in our processing chamber.  We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.


Cheers!


Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>

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