[labnetwork] Please recommend a RF sputter system

[Chang, Long]

Hi Jingqi,

We've been using an AJA ATC 2200 UHV sputtering system with 6 guns for over 9 years. We rarely have any issues with it and whenever we do, it gets solved within a few days because AJA provides "how-to" guides with detailed instructions and photos. We spend ~2 hours to train new students and they rarely fail to transfer samples.

Best,
Long Chang
Manager
UH Nanofabrication Facility
University of Houston
3605 Cullen Blvd, Entrance 14
Room E1007A, SERC Bldg 545
Houston, TX 77204-5062


On Jun 13, 2017, at 7:32 PM, Fouad Karouta <fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>> wrote:

Dear Jingqi,

Since > 10 years we do use an AJA sputter system with 6 guns: 3 RF and 3 DC. The system is running well and we had minor issues that were solved remotely with advice from supplier. They have smaller chambers to fit 4 guns.

Kind regards,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 0200, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jingqi Li
Sent: Tuesday, 13 June 2017 11:30 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Please recommend a RF sputter system

Dear All,
We want to order a RF sputter system with at least 4 target sources. Could you please recommend one company to me according to your experience? The system should have less cross contamination and reliable mechanical operation (for example, sample transportation between chamber and load lock, our current system has a lot of problem with this).

Thanks & Regards
Jingqi Li
Nanofabrication Core Lab
King Abdullah University of Science and Technology
Thuwal 23955-6900
Saudi Arabia

Tel: +966 012 808 4589

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