[labnetwork] Support for Suss SB-6

Stieg, Adam stieg at cnsi.ucla.edu
Wed Jun 21 17:22:20 EDT 2017


Dear All,

We are bringing a Suss SB6 wafer bonder back online after an extended down period and are in need of information regarding standard recipes for bonding under anodic, non-anodic, ambient low pressure, and ambient elevated temperature conditions. If anyone has such information and is willing to share, it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu



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