[labnetwork] ICP-CVD recipe development?

Parker Gould pgould at mit.edu
Wed May 17 10:12:10 EDT 2017


Hi labnetwork members,

I'm currently trying to design some recipes for a new ICP-CVD system we are
developing at MTL/MIT, and I was hoping to find someone to chat briefly
with about some questions we've come up against (mostly regarding gas
delivery and operating pressures).  If anyone has a few moments to spare, I
can be reached at pgould at mit.edu, or via phone at 281-660-9076.

Thank you!
Parker Gould
Schmidt Research Group, MIT
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