[labnetwork] XeF2 sources

[Paolini, Steven]

Dr. Khbeis,
  Synquest laboratories is a reliable source for XeF2. Their headquarters is in Florida but it's produced in South Africa as well. Lead times can be excessive if you order electronic grade in its own cylinder as I do.
Hope this helps.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Friday, October 27, 2017 3:06 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] XeF2 sources

Colleagues and Friends,

We are trying to source XeF2 for a new SPTS etcher. In the past, I found Pelchem (South Africa) to be the most cost-effective source for XeF2, but I cannot seem to make successful contact despite repeated emails/calls.

Can you please recommend sources for XeF2?

Thanks,

Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF)
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu<mailto:khbeis at uw.edu>
www.wnf.washington.edu/<http://www.wnf.washington.edu/>

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