[labnetwork] dealing with photoresist fumes

Tue Apr 17 08:19:52 EDT 2018

Hi Nathanael, 

Our spinners are inside fume hoods and we also added an exhaust point above the fridge where the photoresists are stored as past experience showed that there was bad smell just by opening the resist fridge. 

The nose is a very sensitive detector but it’s not an accurate one so it’s hard to tell how much of the fumes are captured or not based on what you wrote… Consulting EH&S as was suggested here sounds like a good idea. 

Thanks,

Nava

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Facilities

Columbia University

530 w120th st., NY 10027

Room 1015/MC 8903

Office: 212-854-9927

Cell: 201-562-7600

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nathanael Sieb
Sent: Monday, April 16, 2018 12:32 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] dealing with photoresist fumes

Hi all,

I'm curious how the different labs out there deal with photoresist safety.  I know that the fumes can be toxic, but it is difficult to deal with completely.  We have all of our spin coaters under a canopy exhaust that captures a lot of the fumes, but you can still smell it.  Do others put the coaters in a fume hood?  Perhaps use respirators?  Or is it not that big of a concern if you capture most of it?

Thanks,

Nathanael

  _____  

Nathanael Sieb
Director of Operations and Administration

4D LABS, Simon Fraser University    8888 University Drive, Burnaby, B.C. V5A 1S6 

E sieb at 4dlabs.ca <mailto:sieb at 4dlabs.ca>  T 778.782.8084 F 778.782.3765 W www.4dlabs.ca <http://www.4dlabs.ca>  

 <https://www.4dlabs.ca>  <https://www.linkedin.com/company/sfu-4d-labs>  <https://twitter.com/4D_LABS>  <https://www.facebook.com/4dlabs> 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20180417/8bc04f1f/attachment.html>