[labnetwork] CMP slurry for oxide

Fri Aug 3 17:04:24 EDT 2018

1. Versum Materials (formerly Air Products)
2. Cabot Microelectronics

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg
Sent: Thursday, August 2, 2018 4:33 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] CMP slurry for oxide

Dear all,

Can someone recommend a company that sells high quality slurries for oxide polishing with selectivity to silicon and silicon nitride?
The company we were buying from discontinued the slurry we were using and a second vendor is requesting that we sign an NDA before they can send us a quote...

Any recommendations would be greatly appreciated.

Thanks,
Nava

Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Labs
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20180803/9873645e/attachment.html>