[labnetwork] 回覆: Leybold turbo pump controller

[April, Mark R.]

Hi Shane
I have strictly used  Ebara pumps now for the past 20 years.  I have great results from them and some have been online for over 9 plus years running 24/7 without issue.  The customer service is the best I have experienced.
Thanks

Mark R. April
Senior  Equipment Engineer
Microfabrication Laboratory Facilities Lead
[color_logo_small4]
555 Technology Square
Cambridge, MA  02139
mapril at draper.com<mailto:mapril at draper.com>
O # 617-258-1613 C # 617-455-1596
www.draper.com<http://www.draper.com>



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of XIN GUO
Sent: Friday, August 17, 2018 9:01 AM
To: mfcchung at ust.hk
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] 回覆: Leybold turbo pump controller

Hi Colleagues,

My question might not be quite related to this topic but I hope to get some feedback.

We are considering to acquire a PECVD and RIE. I saw some buyers explicitly exclude Leybold pumps in their requirements. I am open to all suppliers but it does seem that Leybold pumps may have more issues than other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean to be bias on any supplier.

Btw, any rule of thumb for choosing pumps for cleanroom equipment?

Thanks

Shane



On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG <mfcchung at ust.hk<mailto:mfcchung at ust.hk>> wrote:

Dear all,



I would like to express my apperciation to the replies from network members, they really give me many valuable suggestions and information regarding to my problem.



With Many Many Thanks

Jeff Chung

________________________________
寄件者: Wing Leong CHUNG
寄件日期: 2018年8月16日 15:32
收件者: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
主旨: Leybold turbo pump controller


Dear network members,



We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further.



Is there any suggestion of company can provide service to repair the controllers?


Jeff Chung
Engineer
Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST)
Cell: (852)-2358-7211
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