[labnetwork] Ge2Sb2Te5 deposition and annealing

[A. William (Bill) FLOUNDERS]

Esta Abelev,
Consult with your campus EH&S.
Tellurium is known for its stench (same family as sulfur)
and exposure to miniscule amounts results in a condition known as tellurium
breath.
Both tellurium and antimony are considered mildly toxic and have defined
threshold exposure limits.
Multiple pump/purge cycles are recommended prior to opening your chamber.
As with any metals, avoid any operations that would generate particulates /
dust.

Bill Flounders
UC Berkeley


On Mon, Feb 5, 2018 at 8:33 AM, Abelev, Esta <eabelev at pitt.edu> wrote:

> Dear Colleagues,
>
>
>
> I would like to ask about deposition and annealing of Ge2Sb2Te5.
>
> The sputtering system we use for Ge2Sb2Te5 deposition is without load
> lock, the smell after depositing is horrible but my main concerns is
> regarding toxicity. Do you know if those materials/odor toxic?
>
> In addition, the group wants to anneal those samples in RTA at low temp
> (below 200C) after the deposition, I am concerns about contaminations?
> Please comment.
>
>
>
> Thank you, Esta
>
>
>
> -----------------------
>
> *Esta Abelev, PhD*
>
> Technical Director, Petersen Institute of NanoScience and Engineering
>
> University of Pittsburgh | 3700 O’Hara Street | 636| Pittsburgh, PA 15261
>
> 412-383-4096 <(412)%20383-4096> | eabelev at pitt.edu | nano.pitt.edu
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