[labnetwork] Molybdenum sputtering

[Mark Hofheins]

Good Morning All,

I have a customer that wants to sputter Mo.

What is a recommended wattage and what types of contamination do I need to be concerned with?


Mark Hofheins

mhofheins at unm.edu<mailto:mhofheins at unm.edu>

505-710-3527



Micro Electronics Technician

Manufacturing Engineering

University of New Mexico MTTC

800 Bradbury S.E.  Suit 235

Albuquerque, New Mexico

87106-4346

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