[labnetwork] equipment question

[Morrison, Richard H., Jr]

Hi everyone,

I have a question on some equipment choices. I am helping a Draper vendor sort out some equipment choices. We are looking at coat/develop cluster systems, we use a negative and a positive resist developed by TMAH and KOH based developers, current process uses the old SVG type tracks but these have lots of PM issues and particles are an issue. Do any of you have any experience with robot feed cluster coat/develop system if so send me an email offline so we can chat, or if you have industry contacts I could speak to that would be good.

Thanks

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>

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