[labnetwork] Hydrogen Purity for Furnaces

Keith Barnes kbarnes at semitorrinc.com
Mon May 7 16:46:04 EDT 2018


But a cheaper grade and use purification

Sent from my iPhone

On May 7, 2018, at 12:56 PM, Bowser, Jerry (Fed) <jerry.bowser at nist.gov<mailto:jerry.bowser at nist.gov>> wrote:

Hello Everyone,

Here at NIST we are having problems with reliable and timely deliveries of hydrogen.  I would like to ask the group what hydrogen purity are you using for your oxidation furnaces and what lead times are you currently seeing?

Thanks!

*******************************************
Jerry Bowser
Assistant Manager for Operations
NanoFab Operations Group
Center for Nanoscale Science and Technology
National Institute of Standards and Technology
Phone: (301) 975-8187

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