[labnetwork] Cryo Si Etching

[McWilliams, Scott]

Hello Bob, It has been many years since I've done deep Si etching, but STS has a good installed base for such tools.  It seems they are still selling these tools,  http://www.spts.com/Products/Plasma-Etch/Si-DRIE.

Regards,  Scott

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Geil, Bob
Sent: Thursday, May 10, 2018 3:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cryo Si Etching

I'm wondering if anyone has worked with Cryogenic ICP etch systems for Si processing.  Oxford Instruments is the only vendor I could find that manufactures these systems.  There also seems to be only a couple of university micro/nanofab facilities with such a system: Georgia Tech and U. Michigan (I'm sure I missed a few others...)   So, my questions are:  does anyone know of other vendors that manufacture cryo ICP etch systems, and is there a particular reason these systems seen to be unpopular?

Best regards,
  Bob Geil

Bob Geil, PhD
Cleanroom Manager, CHANL
Chapel Hill Analytical and Nanofabrication Laboratory Department of Applied Physical Sciences University of North Carolina
223 Chapman Hall, CB# 3216
Chapel Hill, NC 27599

Phone: (919) 843-6555