[labnetwork] HF Vapour Setup

[Fouad Karouta]

Dear all,

We have an AMMT HF vapour setup for up to 4 " wafer size.
Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer.

Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.
Also has anyone good experience with other possible suppliers of HF vapour setup?

Thank you,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 2601, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/

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