[labnetwork] STS/STPS support

[Rosendo Bindoy]

Hello John,

Normally the reason why VAC module fails is because of corrupted EPROM. When you open the module you will find and EPROM labeled as VAC3 ver. XXX (or something like that). Maybe you can try replacing it first if you have a spare VAC EPROM.

Regards,

Rosendo M. Bindoy
Equipment Engineer
Nanofabrication Core Lab
Ibn Sina Bldg. 3 (Sea Side), Level 0 Room 0246
King Abdullah University of Science and Technology
Phone: +966 12 808 4413  Mobile: +966 54 251 5257
Email: rosendo.bindoy at kaust.edu.sa<mailto:rosendo.bindoy at kaust.edu.sa>


From: <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of John Nash <jcn8004 at rit.edu<mailto:jcn8004 at rit.edu>>
Date: Thursday, November 29, 2018 at 5:41 PM
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] STS/STPS support

Does anyone have an STS/ STPS tool that knows of a  good 3rd party support organization? At the moment we are looking for a VAC3 controller or someone that knows how to fix them.

Regards,

John C Nash
SMFL - Technician
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory
82 Lomb Memorial Dr.
Bldg. 17-2627
Rochester, NY 14623

585 478-3835 cell
john.nash at rit.edu<mailto:john.nash at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>




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