[labnetwork] TMA sources

Whitney Rochelle Hess wrhess at mit.edu
Thu Oct 4 10:17:42 EDT 2018


Hi Michael,

We use Strem Chemicals. They also offer cleaning/refilling of the ALD cylinders.

Best,
Whitney
_______________________________
Whitney Hess, PhD
EHS Coordinator
MIT.nano | Microsystems Technology Laboratories
MIT, Room 39-213
Phone: 617-253-8567<tel:617-253-8567>
Email: wrhess at mit.edu<mailto:wrhess at mit.edu>

On Oct 4, 2018, at 9:30 AM, Michael Khbeis <khbeis at uw.edu<mailto:khbeis at uw.edu>> wrote:

Dear Colleagues,

Does anyone have a quick turn source for TMA ALD precursor other than Sigma-Millipore?

Gratefully,

Dr. Michael Khbeis
Washington Nanofab Facility
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101<tel:206.543.5101>
(C) 443.254.5192<tel:443.254.5192>
khbeis at uw.edu<mailto:khbeis at uw.edu>
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