[labnetwork] anti-vibration table for profilometer

[Matthew Moneck]

Hi Shane,

I’m not sure what you want to spend, but we’ve had good experience with TMC lab tables (https://www.techmfg.com/products/labtables).  They can be a bit pricey, although, there are plenty of used ones out there for less money.  We have also used air isolation mounts in some cases.  In this case, you simply replace the leveling feet from a table with the air isolator (here’s one example:  https://www.newport.com/f/compact-air-mount-without-self-leveling).  You may want some an additional dampening mechanism or isolators between the instrument and the table (pads or breadboard for instance), but that being said, we were able to run a KLA P-2 profilometer on a table having these air isolators only without much of an issue.

Best Regards,

Matt

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Matthew T. Moneck, Ph.D.
Executive Manager, Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of XIN GUO
Sent: Friday, September 07, 2018 2:31 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] anti-vibration table for profilometer

Hi Colleagues,

We are looking for an anti-vibration table to set up our KLA D600 profilometer.

Can anyone recommend a product for us? We prefer to not go with a very heavy optical table, if possible.

Cheers

Shane
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