[labnetwork] ALD process for ZnO?

[Tim Gilheart]

Greetings all,

We’re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 

We’re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.

If anyone has suggestions, process notes, and/or cautionary tales, we’d appreciate hearing your perspective.

Thanks,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Office: 713-348-3159 | gilheart at rice.edu