[labnetwork] ALD process for ZnO?

[Tim Gilheart]

Many thanks to everyone for both the responses here on the list and the direct messages we received on this topic. 

We’ve got a lot of good information to digest, and we’ll use that to inform our decision about this material after we receive a response from the tool vendor.

Thanks again,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu


> On Aug 22, 2019, at 9:22 AM, Rinehart, Sean <sean.rinehart at yale.edu> wrote:
> 
> Hi Tim,
> 
> We haven't grown ZnO in our systems, but it's come up before. Something to keep in mind with DEZ (Diethylzinc) based ZnO deposition is its incompatibility with TMA (Trimethyl Aluminum) based Al2O3. TMA can react with ZnO films to form DEZ, and DEZ can react with Al2O3 to form triethyl aluminum. Both of these byproducts are going to affect your intended results. If you run both processes in the same system you'll want to insulate the two films with a few 10s of nms of something that doesn't react with alkyl ligand precursors, e.g., HfO2.
> 
> Hope this helps!
> 
> Sean Rinehart
> Assistant Director, Cleanroom Operations
> Yale University
> 203 432 4303
> 
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu <mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu <mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Tim Gilheart
> Sent: Wednesday, August 21, 2019 2:50 PM
> To: labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> Subject: [labnetwork] ALD process for ZnO?
> 
> Greetings all,
> 
> We’re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 
> 
> We’re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.
> 
> If anyone has suggestions, process notes, and/or cautionary tales, we’d appreciate hearing your perspective.
> 
> Thanks,
> 
> --
> Tim Gilheart, Ph.D.
> Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University
> Office: 713-348-3159 | gilheart at rice.edu
> 
> 
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