[labnetwork] Help setting up a Suss Delta 12L Spray Developer

[Bill Kiether]

Hi,

We recently acquired a Suss Delta 12L Spray Developer from a local
company.  However, it did not come with much in terms of documentation,
etc. Does anyone have one of these tools in their lab, or used them
elsewhere? We would like to set it up for a lift-off process.  Any input
would be appreciated. The main questions are:

1) Did your Environmental Health and Safety team have any major concerns,
and if so, how did you address them?

2) Does anyone have a good standard process that we could use to check out
the operation of the tool?

3) What has been the process that you found most useful for your lab?

Sincerely,

Bill Kiether
NCSU Nanofabrication Facility
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