[labnetwork] Silane and Dichlorosilane Line Evacuation

[Paul Spizzirri]

Hi Guys

We also use these gases here in Australia too and use the xmas shutdown
period to completely pump them out and perform a leak decay test for
integrity reporting - otherwise they are left live throughout the year.
Same configuration as mentioned above with DC, restricted flow control, gas
montoring and DC monitoring etc to life safety systems with central
shutdown. Note that the pump down for DCS is tricky as you are likely to
get liquid condensing in the lines - depending on how long they are, you
could be pumping for days to get them cleared.

Cheers

Paul

On Fri, 15 Feb 2019 at 12:43, Bill Kiether <wjkiethe at ncsu.edu> wrote:

> We do not evacuate between uses, but do evacuate if the lab or system is
> going to be down (and tagged out)  for an extended time (months).
>
> For example, we were shutting a lab for 6 months for construction reasons,
> all of the toxic and flammables were evacuated and backfilled with UHP
> nitrogen ( or Argon).  The backfilling is important as you don't want to
> leave silane lines at vacuum.  Also, once in grad school, we did the same
> thing for a tool on which the only user was studying for 2 months for his
> prelims. That process saved lives as a new post doc decided to "borrow" a
> quarter turn valve off of the system without discussing it.
>
> Bill Kiether
>
>
>
> On Thu, Feb 14, 2019 at 7:47 AM Bruce Tolleson <betemc at rit.edu> wrote:
>
>> Dear users of Silane and Dichlorosilane,
>>
>> When your systems that use silane and dichlorosilane are not in use do
>> you evacuate the lines going to the tool? We are looking for the best
>> practices for gas line safety in a student environment microelectronic
>> clean room.
>>
>> The gas lines are wall mount or overhead coaxial stainless steel all
>> welded lines with excess flow sensors.
>>
>> What are you doing with you silane and dichlorosilane lines?
>>
>> Thank you,
>>
>>
>>
>> Bruce E. Tolleson
>>
>> Rochester Institute of Technology
>>
>> 82  Lomb Memorial Drive, Bldg 17-2627
>>
>> Rochester, NY 14623-5604
>>
>> (585) 478-3836
>>
>> [image: http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]
>>
>>
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-- 
*Dr Paul Spizzirri*
Operations and EHS Manager

*Melbourne Centre for Nanofabrication*
151 Wellington Road
Clayton VIC Australia 3168.

Australian National Fabrication Facility (Victorian Node)

T:  +61 (3) 9902 9653
M:   +61 (4) 0720 3145
E:    paul.spizzirri@ <dwayne.kirk at monash.edu>nanomelbourne.com
W:   nanomelbourne.com <http://nanomelbourne.com/home/>
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