[labnetwork] Silane and Dichlorosilane Line Evacuation

[Aebersold,Julia W.]

We do the same as Draper, but our Silane is stored outside in our bunker.

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr
Sent: Thursday, February 14, 2019 8:00 AM
To: Bruce Tolleson <betemc at rit.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Silane and Dichlorosilane Line Evacuation

Here at Draper the gas is left in the lines at all times, we use double wall stainless and the gas cabinet is tied to the toxic gas monitor. If there is a leak the bottle is automatically shut off. Our gas cabinets  are on the floor below the tools so there is a good distance to travel. If we pumped the lines out it would start to get expensive wasting all the gas. The purge of the lines must be done to ensure that there is no exposure to air so vacuum pump down is used and that will take a long time to evacuate the lines, then on the flip side when you repressurize the lines you may run into issues.

You should talk to your university safety group and check the local codes as every jurisdiction has different rules.

Rick


From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bruce Tolleson
Sent: Wednesday, February 13, 2019 1:48 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Silane and Dichlorosilane Line Evacuation

Dear users of Silane and Dichlorosilane,
When your systems that use silane and dichlorosilane are not in use do you evacuate the lines going to the tool? We are looking for the best practices for gas line safety in a student environment microelectronic clean room.
The gas lines are wall mount or overhead coaxial stainless steel all welded lines with excess flow sensors.
What are you doing with you silane and dichlorosilane lines?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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