[labnetwork] Failure light on Turbotronik NT20

Wed Jul 3 14:50:53 EDT 2019

Hello Kevin,Below is the troubleshooting page for your turbo system; with the FAILURE light ON and LED 6 of the chain ON, it indicates either the pump temperature is too high or there's a coding error (DIP switch on the rear of the controller).  For the 360C, the switch setting should be ON-OFF-ON-ON.  With power off, you can move the DIP switches up n' down to wipe the contacts clean within then reset it to your pump.  The cooling for the pump should be checked and also check fore pump pressure is BELOW 500mT before starting the pump.  On older  controllers there used to be a "counter circuit" that would predict bearing life and after that time was exceeded, the failure light would come on.  There was a RESET button in the controller for this.  Later, I guess they just wanted to let you blow them up as this is no longer incorporated.....

4 Troubleshooting
When a malfunction occurs, the TURBOVAC is brakedand the failure is indicated; see following table.The red LED FAILURE lights permanently and onegreen LED within the chain flashes.After you have eliminated the cause of the failure, youcan reset the malfunction signal with the STOP com-mand (key or remote control).LED flashesSymptom————————————————————————————————————————————————————————————————No. 1Linecord fault.(below)————————————————————————————————————————————————————————————————No. 2TURBOVAC is notsupported by theTURBOTRONIK.————————————————————————————————————————————————————————————————No. 3The TURBOVAC has notattained the target speedwithin 10 minutes.————————————————————————————————————————————————————————————————No. 4Speed below minimum.————————————————————————————————————————————————————————————————No. 5Temperature in theTURBOTRONIK too high.————————————————————————————————————————————————————————————————No. 6Temperature in theTURBOVAC too highor wrong coding.————————————————————————————————————————————————————————————————No. 7Self-test————————————————————————————————————————————————————————————————No. 8Not used.————————————————————————————————————————————————————————————————No. 9Wrong mains connection.GA 05.208/12 - 05/2003WarningProbable CauseMotor connection line incorrectly connected.Motor connection line malfunctioning.TURBOTRONIK and TURBOVACincompatible.Loose contact in connection line.-2Forevacuum pressure >10mbar.Pump blocked.High vacuum pressure too high.-2Forevacuum pressure >10mbar.Pump blocked.High vacuum pressure too high.Frequent switching between acceleration andbraking.Ambient temperature too high.-2Forevacuum pressure >10mbar.Frequent switching between acceleration andbraking.Poor cooling or cooling line interrupted.(coding error?)Excessive current in the output stage of theTURBOTRONIK; e.g. short-circuit.Overcurrent, short-circuitStrong mains interferenceSystem failureMains voltage selector switch incorrectly set.Before you open the TURBOTRONIK, plea-se first disconnect the mains power supplyand disconnect the power cord. Since dan-gerous voltages may nonetheless occur,the unit should only be opened by a quali-fied electrician.Recommended Corrective ActionCheck the motor connection line and connect itcorrectly.Replace the motor connection line.Check the system.Repair the connection lines.Check the forevacuum.Inform the Leybold after-sales service.Check the vacuum chamber.Check the forevacuum.Inform the Leybold after-sales service.Check the vacuum chamber.Let the TURBOTRONIK cool down.Ensure an adequate ventilation.Operate the pump under normal load only.Let the pump cool down and operate undernormal load only.Check the cooling.Turn off the POWER switch on the TURBO-TRONIK, remedy the fault and switch on again.Briefly switch off the TURBOTRONIKand then switch on again.Check the connections.Call the Leybold service department.Set the mains voltage selector switch correctly;see Section 2.1

Link to download the manual : https://www.manualslib.com/manual/1200157/Leybold-Turbotronik-Nt-20.html?page=27#manual
Good Luck!
Dennis J.  Culver  Culver Consulting
5960 Valentine RoadUnit 14, Mail box 13Ventura, CA 93003
Ph (805) 648-1184Fx (805) 648-1485
Cell(805)680-7389
dennis at culverequipment.com

Dear Colleagues,

The turbo pump controller (Leybold Turbotronik NT20)  on our Oxford ICP100 plasma etching tool is giving a Failure light, see attached image. I looked in the manual but all it mentions is pressing the stop button to clear the error. I tried that but the light stays red. I have also tried power cycling the machine (didn't help) and I checked all the fuses (all good there). I also reached out the Oxford and Leybold. Oxford said that it is very old and that they have limited experience. Leybold has not replied. 

Does anyone on the list have experience with troubleshooting this turbo pump controller? The turbo pump itself is a Leybold 361C. I welcome tips on how best to troubleshoot this issue. 

Regards,
Kevin 

--
Kevin M. McPeak
Assistant Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication

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