[labnetwork] special canisters of DES and TEOS for PECVD

Xin (Shane) Guo sguo18 at yorku.ca
Mon Jun 10 10:22:23 EDT 2019


Hi Colleagues,

Thank you all for the kind suggestions.

Best

Shane

On Fri, Jun 7, 2019 at 12:15 PM Xin (Shane) GUO <sguo18 at yorku.ca<mailto:sguo18 at yorku.ca>> wrote:
Hi Colleagues,

Does anyone know where to buy stainless steel canisters with control valves to supply DES and TEOS to PECVD? Some vendors sell DES in a bottle which cannot be connected to the PECVD.

Any feedback is highly appreciated!

Best

Shane
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