[labnetwork] Sputtering Mg, MgO, MgF2

J Romans hromans at eng.ucsd.edu
Wed Jun 12 14:17:21 EDT 2019


Hello Esteemed Colleagues -
Does anyone have any experience sputtering Mg, MgO, MgF2? We have a faculty
inquiry and need to make a determination on risk/possible complications…
Thanks,
J. Hal Romans
Equipment Engineer
Nano3 Cleanroom Facility
University of California San Diego
ph: (858) 534-6674
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