[labnetwork] Cleaning reactive deposition materials prior to install in UHV tool

[Whitney Rochelle Hess]

Hi Nathan,


Cleaning with anhydrous hexane should work. This should be done in an inert atmosphere glovebox.


Best,

Whitney

_________________________________________
Whitney Hess, PhD
EHS Coordinator
MIT.nano | Microsystems Technology Laboratories
MIT, Room 39-213
Phone: 617-253-8567
Email: wrhess at mit.edu
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Nathan Nelson - Fitzpatrick <nnelsonfitzpatrick at uwaterloo.ca>
Sent: Wednesday, June 19, 2019 12:37 PM
To: labnetwork at mtl.mit.edu
Cc: Saba Sadeghi
Subject: [labnetwork] Cleaning reactive deposition materials prior to install in UHV tool

Hi Everyone,

I received a question from another lab on campus here and I'm not sure of the correct advice, I was hoping to rely on this experienced community.

This lab in question is interested in using reactive metal materials (Ba, Sr, etc..) in one of their UHV deposition tools.  Since these materials are reactive in air, they were shipped immersed in an oil.  They were asking me about the best way to clean off the oil prior to installing the material in their deposition system.  I believe they have already tried IPA and were not too happy with its effectiveness.  The vendor recommended "100% mineral spirits", but a quick google search indicates that this is a sort of vaguely defined solution of short chain hydrocarbons (alkanes?).  I was wondering if anyone has experience they could share regarding this type of problem and how they cleaned their materials?

Thank you in advance,
  -Nathan

--
Nathan Nelson-Fitzpatrick  PhD
Nanofabrication Process & Characterization Engineering Manager
Quantum-Nano Fabrication and Characterization Facility (QNFCF)
Office of Research
University of Waterloo
200 University Avenue West, Waterloo, ON  N2L 3G1
P: 519-888-4567 ext. 31796
C: 226-218-3206
https://fab.qnc.uwaterloo.ca

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