[labnetwork] Clean room / Nanofab temp/

[Matthew Moneck]

Hi Patrick,

Our systems are set to target 68 deg +/- 0.5 deg and 40% +/- 1%.

Best Regards,

Matt

--
Matthew T. Moneck, Ph.D.
Executive Manager, Claire & John Bertucci Nanotechnology Laboratory
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
www.ece.cmu.edu<http://www.ece.cmu.edu/>
nanofab.ece.cmu.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Johnson, Patrick
Sent: Monday, March 18, 2019 3:08 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Clean room / Nanofab temp/

 Hello Colleagues,  what do the other NanoFabs basically have there cleanrooms temp and humidity specs set at?  I have been in Semiconductor since 1995 and 67F +/- 1 degree and humidity 45-47%  is what I have encountered.  I appreciate any input from  the LabNetwork partners.  Thanks Patrick
Patrick Johnson
George Washington University
Nano Fabrication Lab Manager
Science and Engineering Hall
800 NW 22nd Street Rm-B2815
Washington D.C. 20052
Cell 703 258 2465
Desk 202 994 2346
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