[labnetwork] Sputtering Fluorine Doped SnO2

jtk1 jtk1 at rice.edu
Tue May 21 23:34:37 EDT 2019


Hello All,

We have a user that is asking about sputtering fluorine doped SnO2. I  
think any SnO2 from Kurt Lesker should be should sputter as well as  
ITO, but I don't know about the fluorine doping part. That is a new  
one for me.

Does anyone have any experience with FTO?

The user seems inclined to even make their own targets somehow and  
then sputter them. Does anyone have experience with home-made sputter  
targets?

Sincerely,

James Kerwin






More information about the labnetwork mailing list