[labnetwork] Help with Neitronix Mask Aligner power supply.

Beaudoin, Mario beaudoin at physics.ubc.ca
Thu May 23 19:26:42 EDT 2019


We have a Neutronix aligner here at UBC.  It works fine for us in CP 
mode but we never managed to make it work in CI mode (would just keep on 
drifting).

On 2019-05-23 11:47 a.m., Johnson, Patrick wrote:
> Hello Group We are having several problems:
>
> 1. The power cannot be adjusted to 350 like in the picture you 
> provided in the manual.
>
> It can only be adjusted from -179 to 59 (at 59 it starts beeping)
>
> I think this is the biggest problem.
>
> We tried ro adjust it in both CP and CI mode with the same bad results.
>
> 2. If we multiply the voltage shown and the current shown, then we get 
> a different value for power than the one shown. Why is that? In the 
> manual, that is not the case. The voltage (67.3) multiplied with 
> current (5.2) gives the power shown (350) for an intensity of 12.0.
>
>
>
> 3. We need to set the tool in intensity constant mode. Probably we 
> need to fix the other problems first, but right now we just tried it 
> by following exactly the instructions and we cannot finetune with SET 
> button because it doesn’t work (rotates but the intensity value 
> doesn’t change).
>
> Also whatever settings we try in intensity constant, it just beeps 
> continuously because the power goes straight to 59.
>
> *Has anyone else encountered this problem.   Thanks Patrick*
>
> */Patrick Johnson/*
> /George Washington University/
> /Nano Fabrication Lab Manager /
> /Science and Engineering Hall/
> /800 NW 22nd Street Rm-B2815/
> /Washington D.C. 20052/
> /Cell 703 258 2465/
> /Desk 202 994 2346/
>
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